Технологии изготовления фотонных кристаллов
A review of methods for fabricating photonic crystals for nanophotonic integrated circuits is presented. A comparative analysis of existing technologies has been carried out. The prospects of applying these technologies under industrial production conditions of devices based on photonic crystals are...
Збережено в:
| Дата: | 2007 |
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| Автор: | |
| Формат: | Стаття |
| Мова: | Українська |
| Опубліковано: |
PE "Politekhperiodika", Book and Journal Publishers
2007
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| Теми: | |
| Онлайн доступ: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.1.45 |
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| Назва журналу: | Technology and design in electronic equipment |
Репозитарії
Technology and design in electronic equipment| Резюме: | A review of methods for fabricating photonic crystals for nanophotonic integrated circuits is presented. A comparative analysis of existing technologies has been carried out. The prospects of applying these technologies under industrial production conditions of devices based on photonic crystals are considered. Conclusions are drawn regarding the use of methods in various industrial environments. |
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