Технологические источники ионов на основе контрагированных разрядов
A universal ion source has been developed which, with appropriate arrangement of construction units, can serve as a plasma generator or as a source of accelerated ion beams of various substances, including active gases. In ion accelerator operation modes, the source provides ion beams with currents...
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| Datum: | 2006 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2006
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.4.55 |
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| Назва журналу: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Zusammenfassung: | A universal ion source has been developed which, with appropriate arrangement of construction units, can serve as a plasma generator or as a source of accelerated ion beams of various substances, including active gases. In ion accelerator operation modes, the source provides ion beams with currents up to 0.6 A and energies up to 5 keV, with uniform distribution of ion current density across a beam cross-sectional area of up to 0.2 m2. |
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