Технологические источники ионов на основе контрагированных разрядов

A universal ion source has been developed which, with appropriate arrangement of construction units, can serve as a plasma generator or as a source of accelerated ion beams of various substances, including active gases. In ion accelerator operation modes, the source provides ion beams with currents...

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Bibliographic Details
Date:2006
Main Authors: Nikitinsky, V. A., Zhuravlyov, B. I.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2006
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Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.4.55
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment