Взаимодействие атомарного водорода с поверхностью монокристаллов кремния

• Date: 2006
• Main Authors: Zhavzharov, E. L., Matushin, V. M.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2006
• Subjects: кремний; поверхность; атомарный водород; потенциал поверхности; структура
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.4.61
• Journal Title: Technology and design in electronic equipment

The effect of atomic hydrogen on silicon single crystals was investigated at 300–310 K, with a chamber pressure of 20 Pa and an atomic hydrogen concentration of about 1019 m–1. Silicon samples of both conductivity types, including n-type Si with (100) and (111) orientations, were treated in an atomi...