Обобщенный теоретический подход к анализу газофазных процессов эпитаксии

• Date: 2006
• Main Authors: Voronin, V. O., Guba, S. K., Sivers, V. N.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2006
• Subjects: газофазная эпитаксия; математическое моделирование; реактор
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.3.50
• Journal Title: Technology and design in electronic equipment

A generalized methodology for modeling kinetic processes of gas-phase formation and the transport of components under nonequilibrium concentration fields in inhomogeneous temperature conditions is proposed. Probabilistic methods were used to calculate mass transfer characteristics. A system of diffu...