Оптимизация аппаратно-программного обеспечения для автоматизации спектрофотометра СФ-20
The hardware and software for automating measurements and processing spectral characteristics of semiconductor structures using the SF-20 spectrophotometer have been optimized. An electrical interface circuit has been proposed. At the software level, a method of double filtering of measured signals...
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| Date: | 2006 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2006
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.19 |
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| Journal Title: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Summary: | The hardware and software for automating measurements and processing spectral characteristics of semiconductor structures using the SF-20 spectrophotometer have been optimized. An electrical interface circuit has been proposed. At the software level, a method of double filtering of measured signals has been implemented. The relative error of the electronic measurement path for optical parameters is less than 0.025%, and the full cycle time for measuring the optical transmission spectrum in the range of 0.19–2.5 μm does not exceed 20 minutes. |
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