Измерение толщины покрытий в процессе их нанесения с помощью емкостного датчика
A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the...
Gespeichert in:
| Datum: | 2006 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2006
|
| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.49 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Technology and design in electronic equipment |
Institution
Technology and design in electronic equipment| Zusammenfassung: | A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the thickness of the applied coating. The authors developed an automated computer system for monitoring coating thickness and created a program for analyzing the deposition process. |
|---|