Измерение толщины покрытий в процессе их нанесения с помощью емкостного датчика
A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the...
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| Date: | 2006 |
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| Main Authors: | , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2006
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.49 |
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| Journal Title: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Summary: | A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the thickness of the applied coating. The authors developed an automated computer system for monitoring coating thickness and created a program for analyzing the deposition process. |
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