Измерение толщины покрытий в процессе их нанесения с помощью емкостного датчика
A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the...
Збережено в:
| Дата: | 2006 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | Українська |
| Опубліковано: |
PE "Politekhperiodika", Book and Journal Publishers
2006
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| Теми: | |
| Онлайн доступ: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.49 |
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| Назва журналу: | Technology and design in electronic equipment |
Репозитарії
Technology and design in electronic equipment| Резюме: | A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the thickness of the applied coating. The authors developed an automated computer system for monitoring coating thickness and created a program for analyzing the deposition process. |
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