Измерение толщины покрытий в процессе их нанесения с помощью емкостного датчика

• Date: 2006
• Main Authors: Istomin, A. S., Semenov, E. I.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2006
• Subjects: автоматизация; емкостной датчик; толщина пленки; тонкие пленки; компьютерная система контроля
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.49
• Journal Title: Technology and design in electronic equipment

A capacitive sensor with a grid or perforated structure is proposed for monitoring coating thickness in vacuum. The method is based on the dependence of capacitor capacitance on the distance between its plates: during material deposition, the capacitance is measured, and its increment indicates the...