Влияние плазмохимического травления на структуру поверхности кремниевых пластин фотоэлектрических преобразователей

• Date: 2006
• Main Authors: Polozov, B. P., Fedorovich, O. A., Golotyuk, V. N., Marinenko, A. A., Lukomsky, D. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2006
• Subjects: фотоэлектрические преобразователи; плазмохимическое травление; плазмохимический реактор
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.2.52
• Journal Title: Technology and design in electronic equipment

The results of plasma-chemical etching (PCE) of the surface of photovoltaic converter (PVC) wafers, pre-structured by chemical etching, are presented. PCE was carried out in a plasma-chemical reactor using a mixture of sulfur hexafluoride (SF₆) and 10% oxygen. Mass spectrometry demonstrated high eff...