X-ray diffraction study of deformation state in InGaN/GaN multilayered structures - V. P. Kladko; A. V. Kuchuk; N. V. Safryuk; V. F. Machulin; A. E. Belyaev; R. V. Konakova; B. S. Yavich (Semiconductor Physics, Quantum Electronics and Optoelectronics, 2010)