Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing
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| Date: | 2010 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2010
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349129 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1000512024-04-17T17:54:44Z Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing V. A. Smyntyna O. V. Sviridova 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349129 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics V. A. Smyntyna O. V. Sviridova Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| format |
Article |
| author |
V. A. Smyntyna O. V. Sviridova |
| author_facet |
V. A. Smyntyna O. V. Sviridova |
| author_sort |
V. A. Smyntyna |
| title |
Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_short |
Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_full |
Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_fullStr |
Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_full_unstemmed |
Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_sort |
genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| publishDate |
2010 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349129 |
| work_keys_str_mv |
AT vasmyntyna genesisofinitialdefectsintheprocessofmonocrystallinesiliconoxidationwithsubsequentscribing AT ovsviridova genesisofinitialdefectsintheprocessofmonocrystallinesiliconoxidationwithsubsequentscribing |
| first_indexed |
2025-07-22T15:14:51Z |
| last_indexed |
2025-07-22T15:14:51Z |
| _version_ |
1850421947920285696 |