Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing
Saved in:
| Date: | 2010 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2010
|
| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349129 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |