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Hydrogen gettering in annealed oxygen-implanted silicon

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Bibliographic Details
Main Authors: A. Misiuk, A. Barcz, A. Ulyashin, I. V. Antonova, M. Prujszczyk
Format: Article
Language:English
Published: 2010
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000349239
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spelling open-sciencenbuvgovua-1000682024-04-17T17:54:58Z Hydrogen gettering in annealed oxygen-implanted silicon A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349239 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
A. Misiuk
A. Barcz
A. Ulyashin
I. V. Antonova
M. Prujszczyk
Hydrogen gettering in annealed oxygen-implanted silicon
format Article
author A. Misiuk
A. Barcz
A. Ulyashin
I. V. Antonova
M. Prujszczyk
author_facet A. Misiuk
A. Barcz
A. Ulyashin
I. V. Antonova
M. Prujszczyk
author_sort A. Misiuk
title Hydrogen gettering in annealed oxygen-implanted silicon
title_short Hydrogen gettering in annealed oxygen-implanted silicon
title_full Hydrogen gettering in annealed oxygen-implanted silicon
title_fullStr Hydrogen gettering in annealed oxygen-implanted silicon
title_full_unstemmed Hydrogen gettering in annealed oxygen-implanted silicon
title_sort hydrogen gettering in annealed oxygen-implanted silicon
publishDate 2010
url http://jnas.nbuv.gov.ua/article/UJRN-0000349239
work_keys_str_mv AT amisiuk hydrogengetteringinannealedoxygenimplantedsilicon
AT abarcz hydrogengetteringinannealedoxygenimplantedsilicon
AT aulyashin hydrogengetteringinannealedoxygenimplantedsilicon
AT ivantonova hydrogengetteringinannealedoxygenimplantedsilicon
AT mprujszczyk hydrogengetteringinannealedoxygenimplantedsilicon
first_indexed 2024-04-18T05:40:33Z
last_indexed 2024-04-18T05:40:33Z
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