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Hydrogen gettering in annealed oxygen-implanted silicon
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Format: | Article |
Language: | English |
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2010
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Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349239 |
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open-sciencenbuvgovua-1000682024-04-17T17:54:58Z Hydrogen gettering in annealed oxygen-implanted silicon A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349239 Article |
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Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Open-Science |
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English |
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Semiconductor Physics, Quantum Electronics and Optoelectronics |
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Semiconductor Physics, Quantum Electronics and Optoelectronics A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk Hydrogen gettering in annealed oxygen-implanted silicon |
format |
Article |
author |
A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk |
author_facet |
A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk |
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A. Misiuk |
title |
Hydrogen gettering in annealed oxygen-implanted silicon |
title_short |
Hydrogen gettering in annealed oxygen-implanted silicon |
title_full |
Hydrogen gettering in annealed oxygen-implanted silicon |
title_fullStr |
Hydrogen gettering in annealed oxygen-implanted silicon |
title_full_unstemmed |
Hydrogen gettering in annealed oxygen-implanted silicon |
title_sort |
hydrogen gettering in annealed oxygen-implanted silicon |
publishDate |
2010 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349239 |
work_keys_str_mv |
AT amisiuk hydrogengetteringinannealedoxygenimplantedsilicon AT abarcz hydrogengetteringinannealedoxygenimplantedsilicon AT aulyashin hydrogengetteringinannealedoxygenimplantedsilicon AT ivantonova hydrogengetteringinannealedoxygenimplantedsilicon AT mprujszczyk hydrogengetteringinannealedoxygenimplantedsilicon |
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2024-04-18T05:40:33Z |
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2024-04-18T05:40:33Z |
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1796887722023976960 |