Hydrogen gettering in annealed oxygen-implanted silicon
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| Date: | 2010 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2010
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349239 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859602907132854272 |
|---|---|
| author | A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk |
| author_facet | A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk |
| author_sort | A. Misiuk |
| collection | Open-Science |
| first_indexed | 2025-07-22T15:14:58Z |
| format | Article |
| id | open-sciencenbuvgovua-100068 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T15:14:58Z |
| publishDate | 2010 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-1000682024-04-17T17:54:58Z Hydrogen gettering in annealed oxygen-implanted silicon A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349239 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics A. Misiuk A. Barcz A. Ulyashin I. V. Antonova M. Prujszczyk Hydrogen gettering in annealed oxygen-implanted silicon |
| title | Hydrogen gettering in annealed oxygen-implanted silicon |
| title_full | Hydrogen gettering in annealed oxygen-implanted silicon |
| title_fullStr | Hydrogen gettering in annealed oxygen-implanted silicon |
| title_full_unstemmed | Hydrogen gettering in annealed oxygen-implanted silicon |
| title_short | Hydrogen gettering in annealed oxygen-implanted silicon |
| title_sort | hydrogen gettering in annealed oxygen-implanted silicon |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000349239 |
| work_keys_str_mv | AT amisiuk hydrogengetteringinannealedoxygenimplantedsilicon AT abarcz hydrogengetteringinannealedoxygenimplantedsilicon AT aulyashin hydrogengetteringinannealedoxygenimplantedsilicon AT ivantonova hydrogengetteringinannealedoxygenimplantedsilicon AT mprujszczyk hydrogengetteringinannealedoxygenimplantedsilicon |