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Hydrogen gettering in annealed oxygen-implanted silicon

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Bibliographic Details
Date:	2010
Main Authors:	A. Misiuk, A. Barcz, A. Ulyashin, I. V. Antonova, M. Prujszczyk
Format:	Article
Language:	English
Published:	2010
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000349239
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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