Complex destruction of near-surface silicon layers of Si-SiO2 structure
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| Datum: | 2010 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2010
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000349387 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859602957717209088 |
|---|---|
| author | I. R. Yatsunskiy O. A. Kulinich |
| author_facet | I. R. Yatsunskiy O. A. Kulinich |
| author_sort | I. R. Yatsunskiy |
| collection | Open-Science |
| first_indexed | 2025-07-22T15:16:07Z |
| format | Article |
| id | open-sciencenbuvgovua-100116 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T15:16:07Z |
| publishDate | 2010 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-1001162024-04-17T17:55:31Z Complex destruction of near-surface silicon layers of Si-SiO2 structure I. R. Yatsunskiy O. A. Kulinich 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349387 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics I. R. Yatsunskiy O. A. Kulinich Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title | Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_full | Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_fullStr | Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_full_unstemmed | Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_short | Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_sort | complex destruction of near-surface silicon layers of si-sio2 structure |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000349387 |
| work_keys_str_mv | AT iryatsunskiy complexdestructionofnearsurfacesiliconlayersofsisio2structure AT oakulinich complexdestructionofnearsurfacesiliconlayersofsisio2structure |