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Complex destruction of near-surface silicon layers of Si-SiO2 structure
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2010
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349387 |
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open-sciencenbuvgovua-100116 |
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open-sciencenbuvgovua-1001162024-04-17T17:55:31Z Complex destruction of near-surface silicon layers of Si-SiO2 structure I. R. Yatsunskiy O. A. Kulinich 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349387 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics I. R. Yatsunskiy O. A. Kulinich Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| format |
Article |
| author |
I. R. Yatsunskiy O. A. Kulinich |
| author_facet |
I. R. Yatsunskiy O. A. Kulinich |
| author_sort |
I. R. Yatsunskiy |
| title |
Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_short |
Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_full |
Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_fullStr |
Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_full_unstemmed |
Complex destruction of near-surface silicon layers of Si-SiO2 structure |
| title_sort |
complex destruction of near-surface silicon layers of si-sio2 structure |
| publishDate |
2010 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349387 |
| work_keys_str_mv |
AT iryatsunskiy complexdestructionofnearsurfacesiliconlayersofsisio2structure AT oakulinich complexdestructionofnearsurfacesiliconlayersofsisio2structure |
| first_indexed |
2024-04-18T05:40:51Z |
| last_indexed |
2024-04-18T05:40:51Z |
| _version_ |
1796887727026733056 |