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Complex destruction of near-surface silicon layers of Si-SiO2 structure

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Bibliographic Details
Date:	2010
Main Authors:	I. R. Yatsunskiy, O. A. Kulinich
Format:	Article
Language:	English
Published:	2010
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000349387
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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