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Compact-sized excimer laser with two-side preionization

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Bibliographic Details
Main Authors: S. M. Baschenko, L. S. Marchenko
Format: Article
Language:English
Published: 2010
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000349389
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spelling open-sciencenbuvgovua-1001182024-04-17T17:55:31Z Compact-sized excimer laser with two-side preionization S. M. Baschenko L. S. Marchenko 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349389 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
S. M. Baschenko
L. S. Marchenko
Compact-sized excimer laser with two-side preionization
format Article
author S. M. Baschenko
L. S. Marchenko
author_facet S. M. Baschenko
L. S. Marchenko
author_sort S. M. Baschenko
title Compact-sized excimer laser with two-side preionization
title_short Compact-sized excimer laser with two-side preionization
title_full Compact-sized excimer laser with two-side preionization
title_fullStr Compact-sized excimer laser with two-side preionization
title_full_unstemmed Compact-sized excimer laser with two-side preionization
title_sort compact-sized excimer laser with two-side preionization
publishDate 2010
url http://jnas.nbuv.gov.ua/article/UJRN-0000349389
work_keys_str_mv AT smbaschenko compactsizedexcimerlaserwithtwosidepreionization
AT lsmarchenko compactsizedexcimerlaserwithtwosidepreionization
first_indexed 2024-04-18T05:40:51Z
last_indexed 2024-04-18T05:40:51Z
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