Compact-sized excimer laser with two-side preionization
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| Datum: | 2010 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2010
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000349389 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1001182024-04-17T17:55:31Z Compact-sized excimer laser with two-side preionization S. M. Baschenko L. S. Marchenko 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349389 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics S. M. Baschenko L. S. Marchenko Compact-sized excimer laser with two-side preionization |
| format |
Article |
| author |
S. M. Baschenko L. S. Marchenko |
| author_facet |
S. M. Baschenko L. S. Marchenko |
| author_sort |
S. M. Baschenko |
| title |
Compact-sized excimer laser with two-side preionization |
| title_short |
Compact-sized excimer laser with two-side preionization |
| title_full |
Compact-sized excimer laser with two-side preionization |
| title_fullStr |
Compact-sized excimer laser with two-side preionization |
| title_full_unstemmed |
Compact-sized excimer laser with two-side preionization |
| title_sort |
compact-sized excimer laser with two-side preionization |
| publishDate |
2010 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349389 |
| work_keys_str_mv |
AT smbaschenko compactsizedexcimerlaserwithtwosidepreionization AT lsmarchenko compactsizedexcimerlaserwithtwosidepreionization |
| first_indexed |
2025-07-22T15:16:08Z |
| last_indexed |
2025-07-22T15:16:08Z |
| _version_ |
1850421955087302656 |