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Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts

Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts

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Bibliographic Details
Main Authors: A. E. Belyaev, N. S. Boltovets, R. V. Konakova, Ya. Ya. Kudryk, A. V. Sachenko, V. N. Sheremet
Format: Article
Language:English
Published: 2010
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000349392
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id open-sciencenbuvgovua-100121
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spelling open-sciencenbuvgovua-1001212024-04-17T17:55:31Z Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts A. E. Belyaev N. S. Boltovets R. V. Konakova Ya. Ya. Kudryk A. V. Sachenko V. N. Sheremet 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349392 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
A. E. Belyaev
N. S. Boltovets
R. V. Konakova
Ya. Ya. Kudryk
A. V. Sachenko
V. N. Sheremet
Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts
format Article
author A. E. Belyaev
N. S. Boltovets
R. V. Konakova
Ya. Ya. Kudryk
A. V. Sachenko
V. N. Sheremet
author_facet A. E. Belyaev
N. S. Boltovets
R. V. Konakova
Ya. Ya. Kudryk
A. V. Sachenko
V. N. Sheremet
author_sort A. E. Belyaev
title Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts
title_short Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts
title_full Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts
title_fullStr Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts
title_full_unstemmed Temperature dependence of contact resistance of Au Ti Pd2Si n+-Si ohmic contacts
title_sort temperature dependence of contact resistance of au ti pd2si n+-si ohmic contacts
publishDate 2010
url http://jnas.nbuv.gov.ua/article/UJRN-0000349392
work_keys_str_mv AT aebelyaev temperaturedependenceofcontactresistanceofautipd2sinsiohmiccontacts
AT nsboltovets temperaturedependenceofcontactresistanceofautipd2sinsiohmiccontacts
AT rvkonakova temperaturedependenceofcontactresistanceofautipd2sinsiohmiccontacts
AT yayakudryk temperaturedependenceofcontactresistanceofautipd2sinsiohmiccontacts
AT avsachenko temperaturedependenceofcontactresistanceofautipd2sinsiohmiccontacts
AT vnsheremet temperaturedependenceofcontactresistanceofautipd2sinsiohmiccontacts
first_indexed 2024-04-18T05:40:52Z
last_indexed 2024-04-18T05:40:52Z
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