Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
Збережено в:
Дата: | 2010 |
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Автори: | , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2010
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Назва видання: | Physical surface engineering |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000877905 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1017542024-04-17T18:06:56Z Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams V. V. Levenets A. A. Shchur B. M. Shirokov 1999-8074 2010 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000877905 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Physical surface engineering |
spellingShingle |
Physical surface engineering V. V. Levenets A. A. Shchur B. M. Shirokov Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
format |
Article |
author |
V. V. Levenets A. A. Shchur B. M. Shirokov |
author_facet |
V. V. Levenets A. A. Shchur B. M. Shirokov |
author_sort |
V. V. Levenets |
title |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
title_short |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
title_full |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
title_fullStr |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
title_full_unstemmed |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
title_sort |
investigation of composition and structure of films based on si-ge alloys by nuclear-physical methods of analysis on proton beams |
publishDate |
2010 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000877905 |
work_keys_str_mv |
AT vvlevenets investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams AT aashchur investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams AT bmshirokov investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams |
first_indexed |
2024-04-18T05:47:34Z |
last_indexed |
2024-04-18T05:47:34Z |
_version_ |
1796887898186842112 |