Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
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| Datum: | 2010 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2010
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000877905 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1017542024-04-17T18:06:56Z Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams V. V. Levenets A. A. Shchur B. M. Shirokov 1999-8074 2010 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000877905 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. V. Levenets A. A. Shchur B. M. Shirokov Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
| format |
Article |
| author |
V. V. Levenets A. A. Shchur B. M. Shirokov |
| author_facet |
V. V. Levenets A. A. Shchur B. M. Shirokov |
| author_sort |
V. V. Levenets |
| title |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
| title_short |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
| title_full |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
| title_fullStr |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
| title_full_unstemmed |
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams |
| title_sort |
investigation of composition and structure of films based on si-ge alloys by nuclear-physical methods of analysis on proton beams |
| publishDate |
2010 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000877905 |
| work_keys_str_mv |
AT vvlevenets investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams AT aashchur investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams AT bmshirokov investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams |
| first_indexed |
2025-07-22T15:43:56Z |
| last_indexed |
2025-07-22T15:43:56Z |
| _version_ |
1850422132331249664 |