Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams

Збережено в:
Бібліографічні деталі
Дата:2010
Автори: V. V. Levenets, A. A. Shchur, B. M. Shirokov
Формат: Стаття
Мова:English
Опубліковано: 2010
Назва видання:Physical surface engineering
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000877905
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-1017542024-04-17T18:06:56Z Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams V. V. Levenets A. A. Shchur B. M. Shirokov 1999-8074 2010 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000877905 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. V. Levenets
A. A. Shchur
B. M. Shirokov
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
format Article
author V. V. Levenets
A. A. Shchur
B. M. Shirokov
author_facet V. V. Levenets
A. A. Shchur
B. M. Shirokov
author_sort V. V. Levenets
title Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_short Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_full Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_fullStr Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_full_unstemmed Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_sort investigation of composition and structure of films based on si-ge alloys by nuclear-physical methods of analysis on proton beams
publishDate 2010
url http://jnas.nbuv.gov.ua/article/UJRN-0000877905
work_keys_str_mv AT vvlevenets investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams
AT aashchur investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams
AT bmshirokov investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams
first_indexed 2024-04-18T05:47:34Z
last_indexed 2024-04-18T05:47:34Z
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