Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams

Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams

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Bibliographic Details
Date:2010
Main Authors: V. V. Levenets, A. A. Shchur, B. M. Shirokov
Format: Article
Language:English
Published: 2010
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000877905
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-101754
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spelling open-sciencenbuvgovua-1017542024-04-17T18:06:56Z Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams V. V. Levenets A. A. Shchur B. M. Shirokov 1999-8074 2010 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000877905 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. V. Levenets
A. A. Shchur
B. M. Shirokov
Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
format Article
author V. V. Levenets
A. A. Shchur
B. M. Shirokov
author_facet V. V. Levenets
A. A. Shchur
B. M. Shirokov
author_sort V. V. Levenets
title Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_short Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_full Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_fullStr Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_full_unstemmed Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
title_sort investigation of composition and structure of films based on si-ge alloys by nuclear-physical methods of analysis on proton beams
publishDate 2010
url http://jnas.nbuv.gov.ua/article/UJRN-0000877905
work_keys_str_mv AT vvlevenets investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams
AT aashchur investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams
AT bmshirokov investigationofcompositionandstructureoffilmsbasedonsigealloysbynuclearphysicalmethodsofanalysisonprotonbeams
first_indexed 2025-07-22T15:43:56Z
last_indexed 2025-07-22T15:43:56Z
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