Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams
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| Date: | 2010 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2010
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000877905 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |