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Investigation of composition and structure of films based on Si-Ge alloys by nuclear-physical methods of analysis on proton beams

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Bibliographic Details
Date:	2010
Main Authors:	V. V. Levenets, A. A. Shchur, B. M. Shirokov
Format:	Article
Language:	English
Published:	2010
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000877905
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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