Photometric monitoring of etching rate of thin dielectric films
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| Date: | 2006 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2006
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| Series: | Technology and design in electronic equipment |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000455196 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1049312024-04-17T18:56:04Z Photometric monitoring of etching rate of thin dielectric films S. E. Semenova E. I. Semenov 2225-5818 2006 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000455196 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Technology and design in electronic equipment |
| spellingShingle |
Technology and design in electronic equipment S. E. Semenova E. I. Semenov Photometric monitoring of etching rate of thin dielectric films |
| format |
Article |
| author |
S. E. Semenova E. I. Semenov |
| author_facet |
S. E. Semenova E. I. Semenov |
| author_sort |
S. E. Semenova |
| title |
Photometric monitoring of etching rate of thin dielectric films |
| title_short |
Photometric monitoring of etching rate of thin dielectric films |
| title_full |
Photometric monitoring of etching rate of thin dielectric films |
| title_fullStr |
Photometric monitoring of etching rate of thin dielectric films |
| title_full_unstemmed |
Photometric monitoring of etching rate of thin dielectric films |
| title_sort |
photometric monitoring of etching rate of thin dielectric films |
| publishDate |
2006 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000455196 |
| work_keys_str_mv |
AT sesemenova photometricmonitoringofetchingrateofthindielectricfilms AT eisemenov photometricmonitoringofetchingrateofthindielectricfilms |
| first_indexed |
2025-07-22T16:42:13Z |
| last_indexed |
2025-07-22T16:42:13Z |
| _version_ |
1850422505273032704 |