Photometric monitoring of etching rate of thin dielectric films
Збережено в:
Дата: | 2006 |
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Автори: | , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2006
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Назва видання: | Technology and design in electronic equipment |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000455196 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1049312024-04-17T18:56:04Z Photometric monitoring of etching rate of thin dielectric films S. E. Semenova E. I. Semenov 2225-5818 2006 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000455196 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Technology and design in electronic equipment |
spellingShingle |
Technology and design in electronic equipment S. E. Semenova E. I. Semenov Photometric monitoring of etching rate of thin dielectric films |
format |
Article |
author |
S. E. Semenova E. I. Semenov |
author_facet |
S. E. Semenova E. I. Semenov |
author_sort |
S. E. Semenova |
title |
Photometric monitoring of etching rate of thin dielectric films |
title_short |
Photometric monitoring of etching rate of thin dielectric films |
title_full |
Photometric monitoring of etching rate of thin dielectric films |
title_fullStr |
Photometric monitoring of etching rate of thin dielectric films |
title_full_unstemmed |
Photometric monitoring of etching rate of thin dielectric films |
title_sort |
photometric monitoring of etching rate of thin dielectric films |
publishDate |
2006 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000455196 |
work_keys_str_mv |
AT sesemenova photometricmonitoringofetchingrateofthindielectricfilms AT eisemenov photometricmonitoringofetchingrateofthindielectricfilms |
first_indexed |
2024-04-18T06:00:25Z |
last_indexed |
2024-04-18T06:00:25Z |
_version_ |
1796888230407176192 |