Photometric monitoring of etching rate of thin dielectric films
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| Datum: | 2006 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2006
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| Schriftenreihe: | Technology and design in electronic equipment |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000455196 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859605379625779200 |
|---|---|
| author | S. E. Semenova E. I. Semenov |
| author_facet | S. E. Semenova E. I. Semenov |
| author_sort | S. E. Semenova |
| collection | Open-Science |
| first_indexed | 2025-07-22T16:42:13Z |
| format | Article |
| id | open-sciencenbuvgovua-104931 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T16:42:13Z |
| publishDate | 2006 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-1049312024-04-17T18:56:04Z Photometric monitoring of etching rate of thin dielectric films S. E. Semenova E. I. Semenov 2225-5818 2006 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000455196 Article |
| spellingShingle | Technology and design in electronic equipment S. E. Semenova E. I. Semenov Photometric monitoring of etching rate of thin dielectric films |
| title | Photometric monitoring of etching rate of thin dielectric films |
| title_full | Photometric monitoring of etching rate of thin dielectric films |
| title_fullStr | Photometric monitoring of etching rate of thin dielectric films |
| title_full_unstemmed | Photometric monitoring of etching rate of thin dielectric films |
| title_short | Photometric monitoring of etching rate of thin dielectric films |
| title_sort | photometric monitoring of etching rate of thin dielectric films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000455196 |
| work_keys_str_mv | AT sesemenova photometricmonitoringofetchingrateofthindielectricfilms AT eisemenov photometricmonitoringofetchingrateofthindielectricfilms |