Photometric monitoring of etching rate of thin dielectric films

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Бібліографічні деталі
Дата:2006
Автори: S. E. Semenova, E. I. Semenov
Формат: Стаття
Мова:English
Опубліковано: 2006
Назва видання:Technology and design in electronic equipment
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000455196
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-1049312024-04-17T18:56:04Z Photometric monitoring of etching rate of thin dielectric films S. E. Semenova E. I. Semenov 2225-5818 2006 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000455196 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Technology and design in electronic equipment
spellingShingle Technology and design in electronic equipment
S. E. Semenova
E. I. Semenov
Photometric monitoring of etching rate of thin dielectric films
format Article
author S. E. Semenova
E. I. Semenov
author_facet S. E. Semenova
E. I. Semenov
author_sort S. E. Semenova
title Photometric monitoring of etching rate of thin dielectric films
title_short Photometric monitoring of etching rate of thin dielectric films
title_full Photometric monitoring of etching rate of thin dielectric films
title_fullStr Photometric monitoring of etching rate of thin dielectric films
title_full_unstemmed Photometric monitoring of etching rate of thin dielectric films
title_sort photometric monitoring of etching rate of thin dielectric films
publishDate 2006
url http://jnas.nbuv.gov.ua/article/UJRN-0000455196
work_keys_str_mv AT sesemenova photometricmonitoringofetchingrateofthindielectricfilms
AT eisemenov photometricmonitoringofetchingrateofthindielectricfilms
first_indexed 2024-04-18T06:00:25Z
last_indexed 2024-04-18T06:00:25Z
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