Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
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| Date: | 2006 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2006
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| Series: | Technology and design in electronic equipment |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000455229 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859605383816937472 |
|---|---|
| author | B. P. Polozov O. A. Fedorovich V. N. Golotjuk A. A. Marinenko D. V. Lukomskij |
| author_facet | B. P. Polozov O. A. Fedorovich V. N. Golotjuk A. A. Marinenko D. V. Lukomskij |
| author_sort | B. P. Polozov |
| collection | Open-Science |
| first_indexed | 2025-07-22T16:42:20Z |
| format | Article |
| id | open-sciencenbuvgovua-104948 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T16:42:20Z |
| publishDate | 2006 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-1049482024-04-17T18:56:14Z Influence of the plasma chemical etching on the silicon plates surface of photo electric converters B. P. Polozov O. A. Fedorovich V. N. Golotjuk A. A. Marinenko D. V. Lukomskij 2225-5818 2006 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000455229 Article |
| spellingShingle | Technology and design in electronic equipment B. P. Polozov O. A. Fedorovich V. N. Golotjuk A. A. Marinenko D. V. Lukomskij Influence of the plasma chemical etching on the silicon plates surface of photo electric converters |
| title | Influence of the plasma chemical etching on the silicon plates surface of photo electric converters |
| title_full | Influence of the plasma chemical etching on the silicon plates surface of photo electric converters |
| title_fullStr | Influence of the plasma chemical etching on the silicon plates surface of photo electric converters |
| title_full_unstemmed | Influence of the plasma chemical etching on the silicon plates surface of photo electric converters |
| title_short | Influence of the plasma chemical etching on the silicon plates surface of photo electric converters |
| title_sort | influence of the plasma chemical etching on the silicon plates surface of photo electric converters |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000455229 |
| work_keys_str_mv | AT bppolozov influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters AT oafedorovich influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters AT vngolotjuk influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters AT aamarinenko influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters AT dvlukomskij influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters |