Influence of the plasma chemical etching on the silicon plates surface of photo electric converters

Influence of the plasma chemical etching on the silicon plates surface of photo electric converters

Saved in:
Bibliographic Details
Date:2006
Main Authors: B. P. Polozov, O. A. Fedorovich, V. N. Golotjuk, A. A. Marinenko, D. V. Lukomskij
Format: Article
Language:English
Published: 2006
Series:Technology and design in electronic equipment
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000455229
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-104948
record_format dspace
spelling open-sciencenbuvgovua-1049482024-04-17T18:56:14Z Influence of the plasma chemical etching on the silicon plates surface of photo electric converters B. P. Polozov O. A. Fedorovich V. N. Golotjuk A. A. Marinenko D. V. Lukomskij 2225-5818 2006 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000455229 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Technology and design in electronic equipment
spellingShingle Technology and design in electronic equipment
B. P. Polozov
O. A. Fedorovich
V. N. Golotjuk
A. A. Marinenko
D. V. Lukomskij
Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
format Article
author B. P. Polozov
O. A. Fedorovich
V. N. Golotjuk
A. A. Marinenko
D. V. Lukomskij
author_facet B. P. Polozov
O. A. Fedorovich
V. N. Golotjuk
A. A. Marinenko
D. V. Lukomskij
author_sort B. P. Polozov
title Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
title_short Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
title_full Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
title_fullStr Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
title_full_unstemmed Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
title_sort influence of the plasma chemical etching on the silicon plates surface of photo electric converters
publishDate 2006
url http://jnas.nbuv.gov.ua/article/UJRN-0000455229
work_keys_str_mv AT bppolozov influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters
AT oafedorovich influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters
AT vngolotjuk influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters
AT aamarinenko influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters
AT dvlukomskij influenceoftheplasmachemicaletchingonthesiliconplatessurfaceofphotoelectricconverters
first_indexed 2025-07-22T16:42:20Z
last_indexed 2025-07-22T16:42:20Z
_version_ 1850422507328241664

Similar Items