Mathematical model of inductor field effect on coefficient of impurity distribution in silicon
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| Дата: | 2009 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2009
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| Назва видання: | Electrometallurgy Today |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000466672 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-105126 |
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open-sciencenbuvgovua-1051262024-04-17T18:57:48Z Mathematical model of inductor field effect on coefficient of impurity distribution in silicon S. G. Egorov I. F. Chervonyj R. N. Voljar 2415-8445 2009 en Electrometallurgy Today http://jnas.nbuv.gov.ua/article/UJRN-0000466672 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Electrometallurgy Today |
| spellingShingle |
Electrometallurgy Today S. G. Egorov I. F. Chervonyj R. N. Voljar Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| format |
Article |
| author |
S. G. Egorov I. F. Chervonyj R. N. Voljar |
| author_facet |
S. G. Egorov I. F. Chervonyj R. N. Voljar |
| author_sort |
S. G. Egorov |
| title |
Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_short |
Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_full |
Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_fullStr |
Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_full_unstemmed |
Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_sort |
mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| publishDate |
2009 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000466672 |
| work_keys_str_mv |
AT sgegorov mathematicalmodelofinductorfieldeffectoncoefficientofimpuritydistributioninsilicon AT ifchervonyj mathematicalmodelofinductorfieldeffectoncoefficientofimpuritydistributioninsilicon AT rnvoljar mathematicalmodelofinductorfieldeffectoncoefficientofimpuritydistributioninsilicon |
| first_indexed |
2025-07-22T16:45:26Z |
| last_indexed |
2025-07-22T16:45:26Z |
| _version_ |
1850422527644401664 |