Mathematical model of inductor field effect on coefficient of impurity distribution in silicon
Gespeichert in:
| Datum: | 2009 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2009
|
| Schriftenreihe: | Electrometallurgy Today |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000466672 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859605486924464128 |
|---|---|
| author | S. G. Egorov I. F. Chervonyj R. N. Voljar |
| author_facet | S. G. Egorov I. F. Chervonyj R. N. Voljar |
| author_sort | S. G. Egorov |
| collection | Open-Science |
| first_indexed | 2025-07-22T16:45:26Z |
| format | Article |
| id | open-sciencenbuvgovua-105126 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T16:45:26Z |
| publishDate | 2009 |
| record_format | dspace |
| series | Electrometallurgy Today |
| spelling | open-sciencenbuvgovua-1051262024-04-17T18:57:48Z Mathematical model of inductor field effect on coefficient of impurity distribution in silicon S. G. Egorov I. F. Chervonyj R. N. Voljar 2415-8445 2009 en Electrometallurgy Today http://jnas.nbuv.gov.ua/article/UJRN-0000466672 Article |
| spellingShingle | Electrometallurgy Today S. G. Egorov I. F. Chervonyj R. N. Voljar Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title | Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_full | Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_fullStr | Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_full_unstemmed | Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_short | Mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| title_sort | mathematical model of inductor field effect on coefficient of impurity distribution in silicon |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000466672 |
| work_keys_str_mv | AT sgegorov mathematicalmodelofinductorfieldeffectoncoefficientofimpuritydistributioninsilicon AT ifchervonyj mathematicalmodelofinductorfieldeffectoncoefficientofimpuritydistributioninsilicon AT rnvoljar mathematicalmodelofinductorfieldeffectoncoefficientofimpuritydistributioninsilicon |