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Mathematical model of inductor field effect on coefficient of impurity distribution in silicon

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Bibliographic Details
Date:	2009
Main Authors:	S. G. Egorov, I. F. Chervonyj, R. N. Voljar
Format:	Article
Language:	English
Published:	2009
Series:	Electrometallurgy Today
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000466672
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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