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High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching

High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching

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Bibliographic Details
Main Author: V. I. Farenik
Format: Article
Language:English
Published: 2004
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000849744
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id open-sciencenbuvgovua-106802
record_format dspace
spelling open-sciencenbuvgovua-1068022024-04-17T19:09:42Z High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching V. I. Farenik 1999-8074 2004 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849744 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. I. Farenik
High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
format Article
author V. I. Farenik
author_facet V. I. Farenik
author_sort V. I. Farenik
title High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
title_short High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
title_full High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
title_fullStr High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
title_full_unstemmed High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
title_sort high-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
publishDate 2004
url http://jnas.nbuv.gov.ua/article/UJRN-0000849744
work_keys_str_mv AT vifarenik highfrequencydischargesoflowpressureinvacuumplasmatechnologyoflowpowerconsumingformicrostructureetching
first_indexed 2024-04-18T06:08:01Z
last_indexed 2024-04-18T06:08:01Z
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