High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
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| Date: | 2004 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2004
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000849744 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606292977418241 |
|---|---|
| author | V. I. Farenik |
| author_facet | V. I. Farenik |
| author_sort | V. I. Farenik |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:16:34Z |
| format | Article |
| id | open-sciencenbuvgovua-106802 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:16:34Z |
| publishDate | 2004 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068022024-04-17T19:09:42Z High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching V. I. Farenik 1999-8074 2004 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849744 Article |
| spellingShingle | Physical surface engineering V. I. Farenik High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching |
| title | High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching |
| title_full | High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching |
| title_fullStr | High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching |
| title_full_unstemmed | High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching |
| title_short | High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching |
| title_sort | high-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000849744 |
| work_keys_str_mv | AT vifarenik highfrequencydischargesoflowpressureinvacuumplasmatechnologyoflowpowerconsumingformicrostructureetching |