Plasma cleaning of technological chambers in rf capacitive discharges
Збережено в:
| Дата: | 2004 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2004
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000849749 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606292943863809 |
|---|---|
| author | V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan |
| author_facet | V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan |
| author_sort | V. Lisovskij |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:16:35Z |
| format | Article |
| id | open-sciencenbuvgovua-106806 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:16:35Z |
| publishDate | 2004 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068062024-04-17T19:09:48Z Plasma cleaning of technological chambers in rf capacitive discharges V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan 1999-8074 2004 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849749 Article |
| spellingShingle | Physical surface engineering V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan Plasma cleaning of technological chambers in rf capacitive discharges |
| title | Plasma cleaning of technological chambers in rf capacitive discharges |
| title_full | Plasma cleaning of technological chambers in rf capacitive discharges |
| title_fullStr | Plasma cleaning of technological chambers in rf capacitive discharges |
| title_full_unstemmed | Plasma cleaning of technological chambers in rf capacitive discharges |
| title_short | Plasma cleaning of technological chambers in rf capacitive discharges |
| title_sort | plasma cleaning of technological chambers in rf capacitive discharges |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000849749 |
| work_keys_str_mv | AT vlisovskij plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT zhpbut plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT klandri plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT ddue plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT vkasan plasmacleaningoftechnologicalchambersinrfcapacitivedischarges |