Plasma cleaning of technological chambers in rf capacitive discharges
Збережено в:
| Дата: | 2004 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2004
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000849749 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106806 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1068062024-04-17T19:09:48Z Plasma cleaning of technological chambers in rf capacitive discharges V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan 1999-8074 2004 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849749 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan Plasma cleaning of technological chambers in rf capacitive discharges |
| format |
Article |
| author |
V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan |
| author_facet |
V. Lisovskij Zh.-P. But K. Landri D. Due V. Kasan |
| author_sort |
V. Lisovskij |
| title |
Plasma cleaning of technological chambers in rf capacitive discharges |
| title_short |
Plasma cleaning of technological chambers in rf capacitive discharges |
| title_full |
Plasma cleaning of technological chambers in rf capacitive discharges |
| title_fullStr |
Plasma cleaning of technological chambers in rf capacitive discharges |
| title_full_unstemmed |
Plasma cleaning of technological chambers in rf capacitive discharges |
| title_sort |
plasma cleaning of technological chambers in rf capacitive discharges |
| publishDate |
2004 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000849749 |
| work_keys_str_mv |
AT vlisovskij plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT zhpbut plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT klandri plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT ddue plasmacleaningoftechnologicalchambersinrfcapacitivedischarges AT vkasan plasmacleaningoftechnologicalchambersinrfcapacitivedischarges |
| first_indexed |
2024-04-18T06:08:02Z |
| last_indexed |
2024-04-18T06:08:02Z |
| _version_ |
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