Plasma cleaning of technological chambers in rf capacitive discharges
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| Date: | 2004 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2004
|
| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000849749 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |