APA (7th ed.) Citation

Valiev, K. A., Maishev, J. P., & Shevchuk, S. L. (2003). Reactive ion-beam synthesis of thin films directly from ion biam.

Chicago Style (17th ed.) Citation

Valiev, K. A., Ju. P. Maishev, and S. L. Shevchuk. Reactive Ion-beam Synthesis of Thin Films Directly from Ion Biam. 2003.

MLA (8th ed.) Citation

Valiev, K. A., et al. Reactive Ion-beam Synthesis of Thin Films Directly from Ion Biam. 2003.

Warning: These citations may not always be 100% accurate.