Reactive ion-beam synthesis of thin films directly from ion biam
Збережено в:
| Дата: | 2003 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2003
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000849878 |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106815 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1068152024-04-17T19:09:48Z Reactive ion-beam synthesis of thin films directly from ion biam K. A. Valiev Ju. P. Maishev S. L. Shevchuk 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849878 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering K. A. Valiev Ju. P. Maishev S. L. Shevchuk Reactive ion-beam synthesis of thin films directly from ion biam |
| format |
Article |
| author |
K. A. Valiev Ju. P. Maishev S. L. Shevchuk |
| author_facet |
K. A. Valiev Ju. P. Maishev S. L. Shevchuk |
| author_sort |
K. A. Valiev |
| title |
Reactive ion-beam synthesis of thin films directly from ion biam |
| title_short |
Reactive ion-beam synthesis of thin films directly from ion biam |
| title_full |
Reactive ion-beam synthesis of thin films directly from ion biam |
| title_fullStr |
Reactive ion-beam synthesis of thin films directly from ion biam |
| title_full_unstemmed |
Reactive ion-beam synthesis of thin films directly from ion biam |
| title_sort |
reactive ion-beam synthesis of thin films directly from ion biam |
| publishDate |
2003 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000849878 |
| work_keys_str_mv |
AT kavaliev reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam AT jupmaishev reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam AT slshevchuk reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam |
| first_indexed |
2024-04-18T06:08:04Z |
| last_indexed |
2024-04-18T06:08:04Z |
| _version_ |
1796888427269980160 |