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Reactive ion-beam synthesis of thin films directly from ion biam

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Bibliographic Details
Main Authors: K. A. Valiev, Ju. P. Maishev, S. L. Shevchuk
Format: Article
Language:English
Published: 2003
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000849878
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record_format dspace
spelling open-sciencenbuvgovua-1068152024-04-17T19:09:48Z Reactive ion-beam synthesis of thin films directly from ion biam K. A. Valiev Ju. P. Maishev S. L. Shevchuk 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849878 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
K. A. Valiev
Ju. P. Maishev
S. L. Shevchuk
Reactive ion-beam synthesis of thin films directly from ion biam
format Article
author K. A. Valiev
Ju. P. Maishev
S. L. Shevchuk
author_facet K. A. Valiev
Ju. P. Maishev
S. L. Shevchuk
author_sort K. A. Valiev
title Reactive ion-beam synthesis of thin films directly from ion biam
title_short Reactive ion-beam synthesis of thin films directly from ion biam
title_full Reactive ion-beam synthesis of thin films directly from ion biam
title_fullStr Reactive ion-beam synthesis of thin films directly from ion biam
title_full_unstemmed Reactive ion-beam synthesis of thin films directly from ion biam
title_sort reactive ion-beam synthesis of thin films directly from ion biam
publishDate 2003
url http://jnas.nbuv.gov.ua/article/UJRN-0000849878
work_keys_str_mv AT kavaliev reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam
AT jupmaishev reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam
AT slshevchuk reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam
first_indexed 2024-04-18T06:08:04Z
last_indexed 2024-04-18T06:08:04Z
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