Reactive ion-beam synthesis of thin films directly from ion biam
Збережено в:
| Дата: | 2003 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2003
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000849878 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606295431086080 |
|---|---|
| author | K. A. Valiev Ju. P. Maishev S. L. Shevchuk |
| author_facet | K. A. Valiev Ju. P. Maishev S. L. Shevchuk |
| author_sort | K. A. Valiev |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:16:39Z |
| format | Article |
| id | open-sciencenbuvgovua-106815 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:16:39Z |
| publishDate | 2003 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068152024-04-17T19:09:48Z Reactive ion-beam synthesis of thin films directly from ion biam K. A. Valiev Ju. P. Maishev S. L. Shevchuk 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849878 Article |
| spellingShingle | Physical surface engineering K. A. Valiev Ju. P. Maishev S. L. Shevchuk Reactive ion-beam synthesis of thin films directly from ion biam |
| title | Reactive ion-beam synthesis of thin films directly from ion biam |
| title_full | Reactive ion-beam synthesis of thin films directly from ion biam |
| title_fullStr | Reactive ion-beam synthesis of thin films directly from ion biam |
| title_full_unstemmed | Reactive ion-beam synthesis of thin films directly from ion biam |
| title_short | Reactive ion-beam synthesis of thin films directly from ion biam |
| title_sort | reactive ion-beam synthesis of thin films directly from ion biam |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000849878 |
| work_keys_str_mv | AT kavaliev reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam AT jupmaishev reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam AT slshevchuk reactiveionbeamsynthesisofthinfilmsdirectlyfromionbiam |