Simulation of the ignition of alow pressure rf capacitive discharge
Збережено в:
| Дата: | 2003 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2003
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000849879 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606316741296128 |
|---|---|
| author | V. A. Lisovskiy J.-P. Booth |
| author_facet | V. A. Lisovskiy J.-P. Booth |
| author_sort | V. A. Lisovskiy |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:17:26Z |
| format | Article |
| id | open-sciencenbuvgovua-106816 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:17:26Z |
| publishDate | 2003 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068162024-04-17T19:09:52Z Simulation of the ignition of alow pressure rf capacitive discharge V. A. Lisovskiy J.-P. Booth 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849879 Article |
| spellingShingle | Physical surface engineering V. A. Lisovskiy J.-P. Booth Simulation of the ignition of alow pressure rf capacitive discharge |
| title | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_full | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_fullStr | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_full_unstemmed | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_short | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_sort | simulation of the ignition of alow pressure rf capacitive discharge |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000849879 |
| work_keys_str_mv | AT valisovskiy simulationoftheignitionofalowpressurerfcapacitivedischarge AT jpbooth simulationoftheignitionofalowpressurerfcapacitivedischarge |