Simulation of the ignition of alow pressure rf capacitive discharge
Збережено в:
| Дата: | 2003 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2003
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000849879 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106816 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1068162024-04-17T19:09:52Z Simulation of the ignition of alow pressure rf capacitive discharge V. A. Lisovskiy J.-P. Booth 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849879 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. A. Lisovskiy J.-P. Booth Simulation of the ignition of alow pressure rf capacitive discharge |
| format |
Article |
| author |
V. A. Lisovskiy J.-P. Booth |
| author_facet |
V. A. Lisovskiy J.-P. Booth |
| author_sort |
V. A. Lisovskiy |
| title |
Simulation of the ignition of alow pressure rf capacitive discharge |
| title_short |
Simulation of the ignition of alow pressure rf capacitive discharge |
| title_full |
Simulation of the ignition of alow pressure rf capacitive discharge |
| title_fullStr |
Simulation of the ignition of alow pressure rf capacitive discharge |
| title_full_unstemmed |
Simulation of the ignition of alow pressure rf capacitive discharge |
| title_sort |
simulation of the ignition of alow pressure rf capacitive discharge |
| publishDate |
2003 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000849879 |
| work_keys_str_mv |
AT valisovskiy simulationoftheignitionofalowpressurerfcapacitivedischarge AT jpbooth simulationoftheignitionofalowpressurerfcapacitivedischarge |
| first_indexed |
2025-07-22T17:17:26Z |
| last_indexed |
2025-07-22T17:17:26Z |
| _version_ |
1850422721937145856 |