Simulation of the ignition of alow pressure rf capacitive discharge
Gespeichert in:
| Datum: | 2003 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2003
|
| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000849879 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606316741296128 |
|---|---|
| author | V. A. Lisovskiy J.-P. Booth |
| author_facet | V. A. Lisovskiy J.-P. Booth |
| author_sort | V. A. Lisovskiy |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:17:26Z |
| format | Article |
| id | open-sciencenbuvgovua-106816 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:17:26Z |
| publishDate | 2003 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068162024-04-17T19:09:52Z Simulation of the ignition of alow pressure rf capacitive discharge V. A. Lisovskiy J.-P. Booth 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849879 Article |
| spellingShingle | Physical surface engineering V. A. Lisovskiy J.-P. Booth Simulation of the ignition of alow pressure rf capacitive discharge |
| title | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_full | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_fullStr | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_full_unstemmed | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_short | Simulation of the ignition of alow pressure rf capacitive discharge |
| title_sort | simulation of the ignition of alow pressure rf capacitive discharge |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000849879 |
| work_keys_str_mv | AT valisovskiy simulationoftheignitionofalowpressurerfcapacitivedischarge AT jpbooth simulationoftheignitionofalowpressurerfcapacitivedischarge |