Simulation of the ignition of alow pressure rf capacitive discharge

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Bibliographic Details
Date:2003
Main Authors: V. A. Lisovskiy, J.-P. Booth
Format: Article
Language:English
Published: 2003
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000849879
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-106816
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spelling open-sciencenbuvgovua-1068162024-04-17T19:09:52Z Simulation of the ignition of alow pressure rf capacitive discharge V. A. Lisovskiy J.-P. Booth 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849879 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. A. Lisovskiy
J.-P. Booth
Simulation of the ignition of alow pressure rf capacitive discharge
format Article
author V. A. Lisovskiy
J.-P. Booth
author_facet V. A. Lisovskiy
J.-P. Booth
author_sort V. A. Lisovskiy
title Simulation of the ignition of alow pressure rf capacitive discharge
title_short Simulation of the ignition of alow pressure rf capacitive discharge
title_full Simulation of the ignition of alow pressure rf capacitive discharge
title_fullStr Simulation of the ignition of alow pressure rf capacitive discharge
title_full_unstemmed Simulation of the ignition of alow pressure rf capacitive discharge
title_sort simulation of the ignition of alow pressure rf capacitive discharge
publishDate 2003
url http://jnas.nbuv.gov.ua/article/UJRN-0000849879
work_keys_str_mv AT valisovskiy simulationoftheignitionofalowpressurerfcapacitivedischarge
AT jpbooth simulationoftheignitionofalowpressurerfcapacitivedischarge
first_indexed 2025-07-22T17:17:26Z
last_indexed 2025-07-22T17:17:26Z
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