Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation
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| Datum: | 2003 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2003
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000849881 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1068182024-04-17T19:09:52Z Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation V. A. Belous V. I. Lapshin I. G. Marchenko I. M. Nekljudov 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849881 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. A. Belous V. I. Lapshin I. G. Marchenko I. M. Nekljudov Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation |
| format |
Article |
| author |
V. A. Belous V. I. Lapshin I. G. Marchenko I. M. Nekljudov |
| author_facet |
V. A. Belous V. I. Lapshin I. G. Marchenko I. M. Nekljudov |
| author_sort |
V. A. Belous |
| title |
Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation |
| title_short |
Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation |
| title_full |
Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation |
| title_fullStr |
Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation |
| title_full_unstemmed |
Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation |
| title_sort |
ion beam technologies of surface modification. i. ion cleaning and high dose implantation |
| publishDate |
2003 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000849881 |
| work_keys_str_mv |
AT vabelous ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation AT vilapshin ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation AT igmarchenko ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation AT imnekljudov ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation |
| first_indexed |
2025-07-22T17:17:27Z |
| last_indexed |
2025-07-22T17:17:27Z |
| _version_ |
1850422722166784000 |