Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation

Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation

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Bibliographic Details
Date:2003
Main Authors: V. A. Belous, V. I. Lapshin, I. G. Marchenko, I. M. Nekljudov
Format: Article
Language:English
Published: 2003
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000849881
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-106818
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spelling open-sciencenbuvgovua-1068182024-04-17T19:09:52Z Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation V. A. Belous V. I. Lapshin I. G. Marchenko I. M. Nekljudov 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849881 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. A. Belous
V. I. Lapshin
I. G. Marchenko
I. M. Nekljudov
Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation
format Article
author V. A. Belous
V. I. Lapshin
I. G. Marchenko
I. M. Nekljudov
author_facet V. A. Belous
V. I. Lapshin
I. G. Marchenko
I. M. Nekljudov
author_sort V. A. Belous
title Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation
title_short Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation
title_full Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation
title_fullStr Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation
title_full_unstemmed Ion beam technologies of surface modification. I. Ion cleaning and high dose implantation
title_sort ion beam technologies of surface modification. i. ion cleaning and high dose implantation
publishDate 2003
url http://jnas.nbuv.gov.ua/article/UJRN-0000849881
work_keys_str_mv AT vabelous ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation
AT vilapshin ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation
AT igmarchenko ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation
AT imnekljudov ionbeamtechnologiesofsurfacemodificationiioncleaningandhighdoseimplantation
first_indexed 2025-07-22T17:17:27Z
last_indexed 2025-07-22T17:17:27Z
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