APA (7th ed.) Citation

Voznyj, A. V., Jam, D. J., Kropotov, J., & Farenik, V. I. (2006). Formation of neutral atomic beam for dry etching and study its charachteristics.

Chicago Style (17th ed.) Citation

Voznyj, A. V., Dzh. Ju Jam, Ju Kropotov, and V. I. Farenik. Formation of Neutral Atomic Beam for Dry Etching and Study Its Charachteristics. 2006.

MLA (8th ed.) Citation

Voznyj, A. V., et al. Formation of Neutral Atomic Beam for Dry Etching and Study Its Charachteristics. 2006.

Warning: These citations may not always be 100% accurate.