Formation of neutral atomic beam for dry etching and study its charachteristics
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| Datum: | 2006 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2006
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000855337 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1068372024-04-17T19:10:02Z Formation of neutral atomic beam for dry etching and study its charachteristics A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik 1999-8074 2006 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000855337 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik Formation of neutral atomic beam for dry etching and study its charachteristics |
| format |
Article |
| author |
A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik |
| author_facet |
A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik |
| author_sort |
A. V. Voznyj |
| title |
Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_short |
Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_full |
Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_fullStr |
Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_full_unstemmed |
Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_sort |
formation of neutral atomic beam for dry etching and study its charachteristics |
| publishDate |
2006 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000855337 |
| work_keys_str_mv |
AT avvoznyj formationofneutralatomicbeamfordryetchingandstudyitscharachteristics AT dzhjujam formationofneutralatomicbeamfordryetchingandstudyitscharachteristics AT jukropotov formationofneutralatomicbeamfordryetchingandstudyitscharachteristics AT vifarenik formationofneutralatomicbeamfordryetchingandstudyitscharachteristics |
| first_indexed |
2025-07-22T17:17:36Z |
| last_indexed |
2025-07-22T17:17:36Z |
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