Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge
Збережено в:
| Дата: | 2006 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2006
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000855338 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606320966008832 |
|---|---|
| author | V. M. Beresnev V. T. Tolok O. M. Shvets E. V. Fursova N. N. Chernyshov L. V. Malikov |
| author_facet | V. M. Beresnev V. T. Tolok O. M. Shvets E. V. Fursova N. N. Chernyshov L. V. Malikov |
| author_sort | V. M. Beresnev |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:17:37Z |
| format | Article |
| id | open-sciencenbuvgovua-106838 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:17:37Z |
| publishDate | 2006 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068382024-04-17T19:10:02Z Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge V. M. Beresnev V. T. Tolok O. M. Shvets E. V. Fursova N. N. Chernyshov L. V. Malikov 1999-8074 2006 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000855338 Article |
| spellingShingle | Physical surface engineering V. M. Beresnev V. T. Tolok O. M. Shvets E. V. Fursova N. N. Chernyshov L. V. Malikov Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge |
| title | Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge |
| title_full | Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge |
| title_fullStr | Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge |
| title_full_unstemmed | Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge |
| title_short | Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge |
| title_sort | micro-nanolayer coverings produced by the method vacuum-arc deposition from use the hf-discharge |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000855338 |
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