Dissociative mode in low-pressure RF discharge
Збережено в:
| Дата: | 2006 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2006
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000855345 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106842 |
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dspace |
| spelling |
open-sciencenbuvgovua-1068422024-04-17T19:10:02Z Dissociative mode in low-pressure RF discharge V. A. Lisovskij 1999-8074 2006 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000855345 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. A. Lisovskij Dissociative mode in low-pressure RF discharge |
| format |
Article |
| author |
V. A. Lisovskij |
| author_facet |
V. A. Lisovskij |
| author_sort |
V. A. Lisovskij |
| title |
Dissociative mode in low-pressure RF discharge |
| title_short |
Dissociative mode in low-pressure RF discharge |
| title_full |
Dissociative mode in low-pressure RF discharge |
| title_fullStr |
Dissociative mode in low-pressure RF discharge |
| title_full_unstemmed |
Dissociative mode in low-pressure RF discharge |
| title_sort |
dissociative mode in low-pressure rf discharge |
| publishDate |
2006 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000855345 |
| work_keys_str_mv |
AT valisovskij dissociativemodeinlowpressurerfdischarge |
| first_indexed |
2024-04-18T06:08:10Z |
| last_indexed |
2024-04-18T06:08:10Z |
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1796888430086455296 |