Dudin, S. V. (2006). Automated system for real-time control of plasma-chemical etching process in ICP.
Chicago Style (17th ed.) CitationDudin, S. V. Automated System for Real-time Control of Plasma-chemical Etching Process in ICP. 2006.
MLA (8th ed.) CitationDudin, S. V. Automated System for Real-time Control of Plasma-chemical Etching Process in ICP. 2006.
Warning: These citations may not always be 100% accurate.