Automated system for real-time control of plasma-chemical etching process in ICP

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Bibliographic Details
Date:	2006
Main Author:	S. V. Dudin
Format:	Article
Language:	English
Published:	2006
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000855346
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

id	open-sciencenbuvgovua-106843
record_format	dspace
spelling	open-sciencenbuvgovua-1068432024-04-17T19:10:02Z Automated system for real-time control of plasma-chemical etching process in ICP S. V. Dudin 1999-8074 2006 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000855346 Article
institution	Library portal of National Academy of Sciences of Ukraine \| LibNAS
collection	Open-Science
language	English
series	Physical surface engineering
spellingShingle	Physical surface engineering S. V. Dudin Automated system for real-time control of plasma-chemical etching process in ICP
format	Article
author	S. V. Dudin
author_facet	S. V. Dudin
author_sort	S. V. Dudin
title	Automated system for real-time control of plasma-chemical etching process in ICP
title_short	Automated system for real-time control of plasma-chemical etching process in ICP
title_full	Automated system for real-time control of plasma-chemical etching process in ICP
title_fullStr	Automated system for real-time control of plasma-chemical etching process in ICP
title_full_unstemmed	Automated system for real-time control of plasma-chemical etching process in ICP
title_sort	automated system for real-time control of plasma-chemical etching process in icp
publishDate	2006
url	http://jnas.nbuv.gov.ua/article/UJRN-0000855346
work_keys_str_mv	AT svdudin automatedsystemforrealtimecontrolofplasmachemicaletchingprocessinicp
first_indexed	2025-07-22T17:17:39Z
last_indexed	2025-07-22T17:17:39Z
_version_	1850422724946558976