Cover Image

Automated system for real-time control of plasma-chemical etching process in ICP

Saved in:

Bibliographic Details
Date:	2006
Main Author:	S. V. Dudin
Format:	Article
Language:	English
Published:	2006
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000855346
Tags:	Add Tag No Tags, Be the first to tag this record!
Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS

Similar Items

Experimental research of ICP reactor for plasma-chemical etching
by: Dudin, S.V., et al.
Published: (2006)

Automation of measurements of the rate of thin films chemical etching
by: Іваницький, В. П., et al.
Published: (2024)

Plasma etching of gallium nitride based heterostructures in production of optoelectronic devices
by: S. V. Dudin
Published: (2006)

Research and development of technological systems based on high-frequency induction discharge for reactive ion-plasma etching of micro- and nanostructures
by: S. V. Dudin
Published: (2009)

Investigation of the influence of oxygen on the rate and anisotropy of deep etching of silicon in the plasma-chemical reactor with the controlled magnetic field
by: V. V. Gladkovskij, et al.
Published: (2017)

Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
by: V. V. Hladkovskiy, et al.
Published: (2017)

Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
by: V. V. Hladkovskiy, et al.
Published: (2017)

Influence of the plasma chemical etching on the silicon plates surface of photo electric converters
by: B. P. Polozov, et al.
Published: (2006)

Plasma potential influence on ion energy istribution function in icp source
by: O. V. Vozniy, et al.
Published: (2007)

Control of Time Scale Dynamical Systems with an Application to Concurrency Control for Real-time Database Systems
by: Ramesh Babu, N., et al.
Published: (2010)

Perception and Image Processing in Real Time Systems
by: V. P. Boiun
Published: (2013)

Automated control systems of the drilling process
by: A. A. Kozhevnikov, et al.
Published: (2018)

Modelling of automated working time control systems in educational institutions
by: V. V. Kolenko, et al.
Published: (2020)

Investigation of the process of microrelief structures formation in chromium films based on the method of chemical etching
by: A. V. Pankratova, et al.
Published: (2021)

2D fluid model for interactive development of ICP technological tools
by: Gapon, A.V., et al.
Published: (2006)

Increase of parallel data processing effectiveness and control of real-time multiprocessor computer system failure
by: V. I. Zhabin
Published: (2015)

Investigation of the process of microrelief structures formation in chromium films based on the method of chemical etching
by: Панкратова, А. В., et al.
Published: (2021)

Automated control system of technological process of applying wear-resistant coatings by ion-plasma method
by: V. M. Tonkonogij, et al.
Published: (2020)

Nanodimensional formations on the CdTe and ZnₓCd₁₋ₓTe surfaces at chemical etching
by: Tomashyk, Z.F., et al.
Published: (2008)

Optimization of conditions for treatment of ZnSe crystal surfaces by chemical etching
by: V. M. Tomashyk, et al.
Published: (2013)

Automated method for determining the etch pits density on crystallographic planes of large semiconductor crystals
by: G. S. Pekar, et al.
Published: (2016)

Development of deep silicon plasma etching for 3D integration technology
by: A. A. Golishnikov, et al.
Published: (2014)

Plasma-Chemical Process Control of Water Purification from Persistent Organic Pollution
by: S. V. Petrov, et al.
Published: (2019)

Hibrid approach to processing incomplete stream data in distributed real-time systems
by: Zhyliuk, Y., et al.
Published: (2025)

Methods and devices for parallel real time information processing
by: H. T. Cherchyk
Published: (2014)

Program support and task planning in real-time systems
by: S. V. Zinchenko, et al.
Published: (2017)

Information Modeling of Complex Automated Process Control Systems, Based on Mivar Technology
by: G. S. Sergushin, et al.
Published: (2013)

Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching
by: I. R. Jatsunskij
Published: (2013)

Optimization of Processes of Managerial Decision-Making Using Real-Time Reporting
by: N. V. Katkova, et al.
Published: (2018)

Highly productive real-time systems for the large-scale applications
by: S. V. Zinchenko
Published: (2014)

System of automated software control of the antenna system of the satellite
by: Yehorov, Volodymyr O.
Published: (2024)

Service-oriented, distributed real-time systems in digital libraries
by: Novitsky, O.V.
Published: (2025)

Dynamical task scheduling in the heterogeneous system with the real time limitations
by: V. P. Simonenko, et al.
Published: (2016)

Influence of intensive etching processes on structure and properties of carbon nitride films
by: Shalaev, R.V., et al.
Published: (2008)

Automated process control of evaporation for assortment product of food industry
by: V. V. Ivashchuk, et al.
Published: (2016)

High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
by: V. I. Farenik
Published: (2004)

Chemical etching of ZnSe crystal surfaced by the H2O2–HBr– acetic acid solutions
by: A. S. Stanetskaja, et al.
Published: (2014)

Event-Network Model of Distructive Processes for the Real-Time Risk-Oriented DSS
by: Ju. N. Bardachev, et al.
Published: (2017)

Photostimulated etching of germanium chalcogenide films
by: V. A. Danko, et al.
Published: (2012)

Photostimulated etching of germanium chalcogenide films
by: Dan’ko, V.A., et al.
Published: (2012)