Plasma potential influence on ion energy istribution function in icp source
Збережено в:
| Дата: | 2007 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2007
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000858403 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606340519854080 |
|---|---|
| author | O. V. Vozniy G. Y. Yeom Yu. Kropotov |
| author_facet | O. V. Vozniy G. Y. Yeom Yu. Kropotov |
| author_sort | O. V. Vozniy |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:18:59Z |
| format | Article |
| id | open-sciencenbuvgovua-106923 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:18:59Z |
| publishDate | 2007 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1069232024-04-17T19:10:34Z Plasma potential influence on ion energy istribution function in icp source O. V. Vozniy G. Y. Yeom Yu. Kropotov 1999-8074 2007 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000858403 Article |
| spellingShingle | Physical surface engineering O. V. Vozniy G. Y. Yeom Yu. Kropotov Plasma potential influence on ion energy istribution function in icp source |
| title | Plasma potential influence on ion energy istribution function in icp source |
| title_full | Plasma potential influence on ion energy istribution function in icp source |
| title_fullStr | Plasma potential influence on ion energy istribution function in icp source |
| title_full_unstemmed | Plasma potential influence on ion energy istribution function in icp source |
| title_short | Plasma potential influence on ion energy istribution function in icp source |
| title_sort | plasma potential influence on ion energy istribution function in icp source |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000858403 |
| work_keys_str_mv | AT ovvozniy plasmapotentialinfluenceonionenergyistributionfunctioninicpsource AT gyyeom plasmapotentialinfluenceonionenergyistributionfunctioninicpsource AT yukropotov plasmapotentialinfluenceonionenergyistributionfunctioninicpsource |