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Plasma potential influence on ion energy istribution function in icp source

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Bibliographic Details
Date:	2007
Main Authors:	O. V. Vozniy, G. Y. Yeom, Yu. Kropotov
Format:	Article
Language:	English
Published:	2007
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000858403
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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