APA (7th ed.) Citation

Korzh, A. F., Lonin, J. F., Pilipets, J. O., Khovanskij, N. A., Sheremet, V. I., & Shirokov, B. M. (2007). Installation for gas-phase deposition of materials.

Chicago Style (17th ed.) Citation

Korzh, A. F., Ju. F. Lonin, Ju. O. Pilipets, N. A. Khovanskij, V. I. Sheremet, and B. M. Shirokov. Installation for Gas-phase Deposition of Materials. 2007.

MLA (8th ed.) Citation

Korzh, A. F., et al. Installation for Gas-phase Deposition of Materials. 2007.

Warning: These citations may not always be 100% accurate.