Installation for gas-phase deposition of materials
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| Date: | 2007 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2007
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000858414 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606342451331072 |
|---|---|
| author | A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov |
| author_facet | A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov |
| author_sort | A. F. Korzh |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:19:03Z |
| format | Article |
| id | open-sciencenbuvgovua-106934 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:19:03Z |
| publishDate | 2007 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1069342024-04-17T19:10:39Z Installation for gas-phase deposition of materials A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov 1999-8074 2007 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000858414 Article |
| spellingShingle | Physical surface engineering A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov Installation for gas-phase deposition of materials |
| title | Installation for gas-phase deposition of materials |
| title_full | Installation for gas-phase deposition of materials |
| title_fullStr | Installation for gas-phase deposition of materials |
| title_full_unstemmed | Installation for gas-phase deposition of materials |
| title_short | Installation for gas-phase deposition of materials |
| title_sort | installation for gas-phase deposition of materials |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000858414 |
| work_keys_str_mv | AT afkorzh installationforgasphasedepositionofmaterials AT juflonin installationforgasphasedepositionofmaterials AT juopilipets installationforgasphasedepositionofmaterials AT nakhovanskij installationforgasphasedepositionofmaterials AT visheremet installationforgasphasedepositionofmaterials AT bmshirokov installationforgasphasedepositionofmaterials |