Installation for gas-phase deposition of materials
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| Date: | 2007 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2007
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000858414 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106934 |
|---|---|
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open-sciencenbuvgovua-1069342024-04-17T19:10:39Z Installation for gas-phase deposition of materials A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov 1999-8074 2007 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000858414 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov Installation for gas-phase deposition of materials |
| format |
Article |
| author |
A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov |
| author_facet |
A. F. Korzh Ju. F. Lonin Ju. O. Pilipets N. A. Khovanskij V. I. Sheremet B. M. Shirokov |
| author_sort |
A. F. Korzh |
| title |
Installation for gas-phase deposition of materials |
| title_short |
Installation for gas-phase deposition of materials |
| title_full |
Installation for gas-phase deposition of materials |
| title_fullStr |
Installation for gas-phase deposition of materials |
| title_full_unstemmed |
Installation for gas-phase deposition of materials |
| title_sort |
installation for gas-phase deposition of materials |
| publishDate |
2007 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000858414 |
| work_keys_str_mv |
AT afkorzh installationforgasphasedepositionofmaterials AT juflonin installationforgasphasedepositionofmaterials AT juopilipets installationforgasphasedepositionofmaterials AT nakhovanskij installationforgasphasedepositionofmaterials AT visheremet installationforgasphasedepositionofmaterials AT bmshirokov installationforgasphasedepositionofmaterials |
| first_indexed |
2025-07-22T17:19:03Z |
| last_indexed |
2025-07-22T17:19:03Z |
| _version_ |
1850422735409250304 |