Rf potential determination at the driven electrode in complex technological gas discharge set-up

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Bibliographic Details
Date:2005
Main Authors: V. Lisovskij, Zh.-P. But, K. Landri, D. Due, G. Renar, V. Kasan
Format: Article
Language:English
Published: 2005
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000859333
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS