Development of arc suppression technique for reactive magnetron sputtering
Збережено в:
| Дата: | 2005 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2005
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000859378 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106993 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1069932024-04-17T19:11:04Z Development of arc suppression technique for reactive magnetron sputtering S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz 1999-8074 2005 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000859378 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz Development of arc suppression technique for reactive magnetron sputtering |
| format |
Article |
| author |
S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz |
| author_facet |
S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz |
| author_sort |
S. V. Dudin |
| title |
Development of arc suppression technique for reactive magnetron sputtering |
| title_short |
Development of arc suppression technique for reactive magnetron sputtering |
| title_full |
Development of arc suppression technique for reactive magnetron sputtering |
| title_fullStr |
Development of arc suppression technique for reactive magnetron sputtering |
| title_full_unstemmed |
Development of arc suppression technique for reactive magnetron sputtering |
| title_sort |
development of arc suppression technique for reactive magnetron sputtering |
| publishDate |
2005 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000859378 |
| work_keys_str_mv |
AT svdudin developmentofarcsuppressiontechniqueforreactivemagnetronsputtering AT vifarenik developmentofarcsuppressiontechniqueforreactivemagnetronsputtering AT andahov developmentofarcsuppressiontechniqueforreactivemagnetronsputtering AT jwalkowicz developmentofarcsuppressiontechniqueforreactivemagnetronsputtering |
| first_indexed |
2025-07-22T17:19:30Z |
| last_indexed |
2025-07-22T17:19:30Z |
| _version_ |
1850422742387523584 |