Development of arc suppression technique for reactive magnetron sputtering
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| Date: | 2005 |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
2005
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000859378 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606355291144192 |
|---|---|
| author | S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz |
| author_facet | S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz |
| author_sort | S. V. Dudin |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:19:30Z |
| format | Article |
| id | open-sciencenbuvgovua-106993 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:19:30Z |
| publishDate | 2005 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1069932024-04-17T19:11:04Z Development of arc suppression technique for reactive magnetron sputtering S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz 1999-8074 2005 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000859378 Article |
| spellingShingle | Physical surface engineering S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz Development of arc suppression technique for reactive magnetron sputtering |
| title | Development of arc suppression technique for reactive magnetron sputtering |
| title_full | Development of arc suppression technique for reactive magnetron sputtering |
| title_fullStr | Development of arc suppression technique for reactive magnetron sputtering |
| title_full_unstemmed | Development of arc suppression technique for reactive magnetron sputtering |
| title_short | Development of arc suppression technique for reactive magnetron sputtering |
| title_sort | development of arc suppression technique for reactive magnetron sputtering |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000859378 |
| work_keys_str_mv | AT svdudin developmentofarcsuppressiontechniqueforreactivemagnetronsputtering AT vifarenik developmentofarcsuppressiontechniqueforreactivemagnetronsputtering AT andahov developmentofarcsuppressiontechniqueforreactivemagnetronsputtering AT jwalkowicz developmentofarcsuppressiontechniqueforreactivemagnetronsputtering |